Optical second harmonic generation (SHG) spectroscopy is used to probe Si(0
01) following thermal decomposition of diborane at the surface. Incorporati
on of boron (B) at second layer substitutional sires at H-free Si(001) inte
nsifies and redshifts the E-1 SHG spectral peak, while subsequent H termina
tion further intensifies and blueshifts E-1, in sharp contrast to the effec
t of hulk B doping or nonsubstitutional B. Ab initio pseudopotential and se
miempirical tight binding calculations independently reproduce these unique
trends, and attribute them to the: surface electric field associated with
charge transfer to electrically active B accepters, and rehybridization of
atomic bonds.