The effect of mesh anode on cathodic arc in focusing magnetic field

Citation
T. Zhang et al., The effect of mesh anode on cathodic arc in focusing magnetic field, CHIN PHYS, 9(4), 2000, pp. 279-283
Citations number
9
Categorie Soggetti
Physics
Journal title
CHINESE PHYSICS
ISSN journal
10091963 → ACNP
Volume
9
Issue
4
Year of publication
2000
Pages
279 - 283
Database
ISI
SICI code
1009-1963(200004)9:4<279:TEOMAO>2.0.ZU;2-A
Abstract
The performance and characteristics of a cathodic are deposition apparatus consisting of a titanium cathode, an anode with and without a tungsten mesh , and a coil producing a focusing magnetic field between the anode and cath ode are investigated. The are voltage V-a is measured with a fixed are curr ent. The relationship between V-a and the magnetic held B with and without a mesh is obtained. In addition, the relationship between the are current I -a and V-c, the voltage to which the artificial transmission line was charg ed, is measured with and without the mesh to determine the minimum ignition voltage for the are. The are resistance increases with the focusing magnet ic strength B and decreases when using the mesh. Our results indicate that the high transparency and large area of the mesh allows a high plasma flux to penetrate the anode from the cathodic are. The mesh also stabilizes the cathodic are and gives better performance when used in concert with a focus ing magnetic field.