2-DIMENSIONAL MICROMECHANICAL BIMORPH ARRAYS FOR DETECTION OF THERMAL-RADIATION

We demonstrate that two-dimensional arrays of micromechanical bimorphs can be used as thermal sensors to image infrared (IR) radiation. A de nsity of 100 pixels per mm(2) is achieved by coiling a bimorph beam in to the shape of a flat spiral. Temperature variations of a given spira l are converted to modulations of visible light by illuminating the sp iral array with a visible source. The optical properties of the spiral resemble a Fresnel zone plate when light reflected off neighboring ri ngs of the spiral is focused. When a spiral is heated through the abso rption of IR radiation, thermally induced bending of the bimorph degra des the focusing efficiency by distorting the spiral. This reduces the optical intensity at the focal point. Arrays of spirals can be monito red with a commercial CCD camera. At 40 Hz, the temperature resolution and noise equivalent power of a 75 mu m diam spiral are 50 mu K/root Hz and 20 nW/root Hz, respectively, and the thermal response time is 2 70 mu s. (C) 1997 American Institute of Physics.