Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses

Authors
Ballen, TA Leger, JR Glumac, DE Swanson, LS Gage, E
Citation
Ta. Ballen et al., Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses, OPTICS LETT, 25(8), 2000, pp. 515-517
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICS LETTERS
ISSN journal
01469592 → ACNP
Volume
25
Issue
8
Year of publication
2000
Pages
515 - 517
Database
ISI
SICI code
0146-9592(20000415)25:8<515:UOMTTR>2.0.ZU;2-3
Abstract
Mass-transport smoothing has been used to reduce the surface roughness of a gallium phosphide (GaP) microlens from 50.0 nm (rms) to 6.5 nm (rms) while preserving the original surface figure. The initial GaP surface was fabric ated by dry-etch transfer of a polymer microlens into a GaP substrate. This result demonstrates that mass transport can significantly improve the perf ormance of economically feasible high-refractive-index micro-optical elemen ts having arbitrary surface profiles. (C) 2000 Optical Society of America. OCIS codes: 350.3950, 220,3630, 160.6000, 240.5770, 220.4000.