Surface characterization and roughness measurement in engineering

Authors
Citation
Dj. Whitehouse, Surface characterization and roughness measurement in engineering, T APPL PHYS, 77, 2000, pp. 413-461
Citations number
58
Categorie Soggetti
Current Book Contents","Current Book Contents
Journal title
ISSN journal
03034216
Volume
77
Year of publication
2000
Pages
413 - 461
Database
ISI
SICI code
0303-4216(2000)77:<413:SCARMI>2.0.ZU;2-E
Abstract
Surfaces are becoming more important especially as miniaturization progress es and with the advent of micro mechanics. The role of the surface is explo red with respect to control of manufacture and prediction of performances a t interfaces and rubbing bodies. This is developed to include some aspects of designer surfaces. Instruments for measuring surfaces are critically exa mined. These include the well-known stylus method, optical methods and the new generation of scanning probe methods: Atomic Force Microscopy (AFM) and Scanning Tunneling Microscopy (STM). Finally, the ways in which surfaces a re characterized from profile traces and over an area are described.