The low energy electron induced damage in self-assembled monolayers (SAM) f
ormed from semifluorinated alkanethiolates (SFAT) of CF3(CF2)(9)(CH2)(n)SH
(F10HnSH) with different hydrocarbon chain length (n=2, 11 and 17) on polyc
rystalline gold has been monitored in-situ by X-ray photoelectron spectrosc
opy and angle resolved near edge X-ray absorption fine structure spectrosco
py. All investigated SFAT SAMs exhibit qualitatively similar behavior with
respect to low energy electron irradiation. Both the fluorocarbon and hydro
carbon parts and the S/Au interface are affected simultaneously. Progressiv
e disordering of initially well-ordered, densely packed SAMs, desorption of
film constituents, and chemical changes within the residual film are obser
ved. Desorption of sulfur-containing fragments, which probably include the
complete SFAT chains, was only found for F10H2S/Au. The desorbed carbon-con
taining fragments originate almost exclusively from the fluorocarbon part o
f the SFAT SAMs. Fluorine desorbs not only as a constituent of the carbon-c
ontaining fragments, but through irradiation-induced scission of C-F bonds.
The accumulated chemical changes within the residual SFAT films include th
e complete disappearance of CF3 tail group, partial transformation of CF2 m
oieties into CF entities, appearance of C=C double bonds in the fluorocarbo
n and hydrocarbon (predominantly) parts, and transformation of the thiolate
head groups into new irradiation-induced sulfur species. Some general tend
encies in the reaction of SAMs toward electron-irradiation are noticed in f
ull agreement with previous findings for conventional AT SAMs.