The decay of mounds about a dozen layers high on the Si(111)-(7 X 7) surfac
e has been measured quantitatively by scanning tunneling microscopy and com
pared with analytic predictions fur the power-law dependence on time predic
ted for a step-mediated decay mechanism. Conformably, we find an exponent 1
/4 associated with the (3D) decay of the mound height and exponent 1/3 asso
ciated with the (2D) decay of top-layer islands. Using parameters from a co
ntinuum step model, we capture the essence of the kinetics. Qualitative fea
tures distinguish these mounds from multilayer islands found on metals.