This paper describes an image analysis procedure developed to characterize
the morphology of MPCVD diamond deposits in the early stage of the depositi
on process. The covering ratio (substrate surface covered by diamond), dens
ity and size distribution of diamond islands were measured on scanning micr
oscopy images, using algorithms based either on individual analysis of isol
ated particles or on a two-dimensional boolean model. As the second procedu
re just requires to perform global measurements, it has the advantage to re
main efficient even for large covering ratios.