Image analysis to characterize CVD diamond deposits

This paper describes an image analysis procedure developed to characterize the morphology of MPCVD diamond deposits in the early stage of the depositi on process. The covering ratio (substrate surface covered by diamond), dens ity and size distribution of diamond islands were measured on scanning micr oscopy images, using algorithms based either on individual analysis of isol ated particles or on a two-dimensional boolean model. As the second procedu re just requires to perform global measurements, it has the advantage to re main efficient even for large covering ratios.