Fabrication of bimetallic cantilevers and its characterization

Most SPM sensors utilize a current-imaging technique or force-imaging techn iques that allow imaging nanoscale topography of the surface using a nanosc ale tip on cantilever. In this work, the various cantilevers were microfabr icated with a SiO2 thin film or a Si3N4 thin film. Thermal imaging techniqu e using microfabricated Si3N4 cantilevers has been investigated. The temper ature change and heat flow across the fabricated bimetallic cantilever will create angular bending of the bimetallic metal-coated lever. Its thermal r esponse was qualitatively examined during an endothermic chemical reaction using optical deflection methods. The chemical used in this experiment is t he tetradecanol CH3(CH2)(13)OH, with a known theoretical phase transition t emperature of similar to 313 K.