The epitaxial growth of thin CaGe2 films with reactive deposition epitaxy (
RDE) on Ge(1 1 1) substrates is described. The films consist in general of
a mixture of the known trigonal rhombohedral tr6 modification and a hexagon
al h2 modification of CaGe2 containing two Ca and two buckled Ge layers per
unit cell in a twofold stacking sequence whose formation appears to be fav
ored by strain. Epitaxial layers of both polytypes show remarkably higher c
rystalline quality compared to epitaxial CaSi2 films grown on silicon subst
rates. The tr6 modification is found to be unstable in air in contrast to t
he h2 modification. (C) 2000 Elsevier Science B.V. All rights reserved.