An efficient method, the high-temperature proton exchange (HTPE), to fabric
ate high-qualitly LiNbO3 optical waveguides is studied. The new proton exch
ange source, the stearic acid diluted by lithium stearate, is proposed for
HTPE process. The known soft proton exchange (SPE) process can be realized
by HTPE. There are no phase transitions when the ct-phase waveguides are fa
bricated by SPE, This phase presents the same crystalline structure as that
of LiNbO3 and, as expected, maintains the excellent nonlinear and electroo
ptical properties of the bulk material. The kinetics of HTPE is studied.