Multilayer piezoelectric actuator with AgPd internal electrode

Using 70Ag/30Pd paste as an internal electrode which can be sintered at low temperature and have cost down effect in mass productions, multilayer piez oelectric actuators (MPAs) were fabricated with 75 layers, 30 mu m thicknes s layer, by conventional multilayer capacitor(MLC) techniques. The multilay er piezoelectric actuators had no defects such as diffusions of the interna l electrode to ceramic body and shortage of internal electrodes. The MPA di d not show the cracks in the ceramics parts and the gapping phenomena in th e external electrodes when Ag paste was used as external electrodes. The MP A devices showed a maximum displacement of 4 mu m at 100 V de voltage and k ept the maximum displacement constant for 300 s. The MPA showed good matchi ng properties between ceramic bodies and AgPd internal electrodes. We confi rmed the possibility of large scale production of the multilayer piezoelect ric actuators with superior electrical properties and a cost down effect us ing 70Ag/30Pd paste as an internal electrode. (C) 2000 Elsevier Science Ltd . All rights reserved.