Citation
Y. Nakayama et al., Microprocess for fabricating carbon-nanotube probes of a scanning probe microscope, J VAC SCI B, 18(2), 2000, pp. 661-664
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023
→ ACNP
Volume
18
Issue
2
Year of publication
2000
Pages
661 - 664
Database
ISI
SICI code
1071-1023(200003/04)18:2<661:MFFCPO>2.0.ZU;2-G
Abstract
We have developed microprocesses to make carbon-nanotube probes for a scann
ing probe microscope, The processes contain electric-field induced transpor
tation, welding and fixation by electron-beam carbon deposition and are per
formed in a scanning electron microscope equipped with two individual manip
ulable stages. Using the nanotube probes produced, a fine structure of heli
cal and twinned deoxyribonucleic acid and an abrupt height transition with
high fidelity in a 4.7 GB digital versatile disk are imaged with tapping-mo
de atomic force microscopy in air. (C) 2000 American Vacuum Society. [S0734
-211X(00)02502-6].