Papers from the 12th International Vacuum Microelectronics Conference - Preface

Authors
Hartnagel, HL Koops, HWP Dziuban, J
Citation
Hl. Hartnagel et al., Papers from the 12th International Vacuum Microelectronics Conference - Preface, J VAC SCI B, 18(2), 2000, pp. 883-883
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
18
Issue
2
Year of publication
2000
Pages
883 - 883
Database
ISI
SICI code
1071-1023(200003/04)18:2<883:PFT1IV>2.0.ZU;2-8