Mechanical and structural characterization of ceramic spacers with a high aspect ratio for 5.2 in. field emission displays

Citation
Sy. Jung et al., Mechanical and structural characterization of ceramic spacers with a high aspect ratio for 5.2 in. field emission displays, J VAC SCI B, 18(2), 2000, pp. 905-910
Citations number
4
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
18
Issue
2
Year of publication
2000
Pages
905 - 910
Database
ISI
SICI code
1071-1023(200003/04)18:2<905:MASCOC>2.0.ZU;2-T
Abstract
Ceramic spacers with a high aspect ratio (80 mu m/1.1 mm) were fabricated a nd laid out in a high voltage 5.2 in. field emission display (FED) panel. A lumina was chosen as spacer material and sintered at 1600 degrees C for hig h mechanical strength and suitable electric resistivity. Three different ty pes of spacers, single-trench type, double-trench type, and honey-comb type s, were considered in this study. We optimized the structure and the layout of spacers in terms of stress distributions, build up profiles of glass, c arrier gas flows inside a panel. Among the three different types of spacers , the double-trench structure spacer provided the most uniform gas flow and the highest mechanical strength. The optimal number of spacers with 80 mu m width and 1.1 mm height was found to be 7 for an uniform stress distribut ion in a 5.2 in. FED panel by experiments and computer simulations. (C) 200 0 American Vacuum Society. [S0734-211X(00)07702-7].