A. Bardal et I. Lie, Measuring the thickness of aluminium alloy thin foils using electron energy loss spectroscopy, MATER CHAR, 44(3), 2000, pp. 329-343
Combining electron energy loss spectroscopy and convergent beam electron di
ffraction measurements, we have determined the mean-free-path for inelastic
electron scattering for four different aluminium alloys. Electron energy l
oss spectroscopy spectra were acquired with the transmission electron micro
scope in image mode, without any objective aperture inserted. The value for
pure aluminium was determined as 119 +/- 5nm at an incident electron energ
y of 150keV. For the most common alloys with moderate amounts of alloying e
lements, no significant changes in the mean-free-path values are measured w
ithin the 5% accuracy of the method. The-mean-free path values are required
for accurate determination of the thickness of thin foils for transmission
electron microscopy using electron energy loss spectroscopy On the basis o
f our experimental results, we estimate a single measurement of foil thickn
ess to have an accuracy of better than 8% if the mean-free-path is known wi
thin 5%. The outlined procedure for thickness measurements is very robust,
with thickness results being insensitive to experimental details such as in
clination of the specimen or diffracting conditions. (C) Elsevier Science I
nc., 2000. All rights reserved.