This work aims to study the structural properties of Co-SiO2 discontinuous
multilayers, obtained by magnetron sputtering. Such structure consisting of
equally spaced planes of Co aggregates is embedded in a SiO2 matrix. Accor
ding to the nanostructure, the size of the metallic aggregates and the mean
distance between them, the magnetic and transport properties of the discon
tinuous multilayers can be strongly modified. We used grazing incidence sma
ll angle X-ray scattering technique (GISAXS) for the structural and morphol
ogical characterisation of metallic aggregates in some selected multilayers
, as a function of the metal thickness and annealing conditions after depos
ition. GISAXS measurements were carried out at the ESRF on ID01 beamline. B
elow the percolation threshold, we are able to determine the aggregate dens
ity by this technique. The in-plane structure of the sample varies with the
nominal thickness and annealing up to 400 degrees C seems to have a weak e
ffect on the film characteristics. (C) 2000 Published by Elsevier Science B
.V. All rights reserved.