Roughness in sputtered multilayers analyzed by transmission electron microscopy and X-ray diffuse scattering

Sputtered W/C multilayers with a period of 25 Angstrom have been studied bo th by cross-section TEM and by X-ray diffuse scattering using 10 keV synchr otron radiation. Fitting to the X-ray data is aided by the TEM images in mo deling the roughness and roughness propagation within the Born approximatio n. We report on a study of the correctness of the often applied small rough ness approximation, and we find that is not well justified in the present c ase. In order to probe short lateral length scales at q(y) = 0.1 Angstrom(- 1), diffuse scattering data were obtained in an unconventional scattering g eometry. (C) 2000 Published by Elsevier Science B.V. All rights reserved.