A. Ulyanenkov et al., The genetic algorithm: refinement of X-ray reflectivity data from multilayers and thin films, PHYSICA B, 283(1-3), 2000, pp. 237-241
A genetic algorithm (GA) technique has been implemented for determination o
f structural parameters of thin solid film and superlattice from the X-ray
reflectivity and diffuse scattering data. The fundamental concepts underlyi
ng genetic algorithms are described along with examples of classical nanost
ructures illustrating successful application of GA. The method is demonstra
ted to be robust and flexible in comparison with conventional optimization
techniques. (C) 2000 Elsevier Science B.V. All rights reserved.