Dielectric enhancement and ferroelectric anomaly of compositionally graded(Pb, Ca)TiO3 thin films derived by a modified sol-gel technique

Compositionally graded (Pb, Ca)TiO3 thin films were prepared on platinum-co ated silicon substrates by a monoethanolamine-modified sol-gel technique. T he crystalline orientation and surface morphology of the graded films were related to the deposition sequence of the film layer. The dielectric consta nts, for up-graded and down-graded films annealed at 600 degrees C for 60 m in were found to be 504 and 399, respectively. Both were larger than those reported for conventional (Pb, Ca)TiO3 thin films. The compositionally grad ed films had large polarization offsets in hysteresis loops when driven by an alternating electric field. The magnitude of polarization offsets displa yed a power-law dependence on the electric field, and the direction of the offsets depended on the direction of the composition gradient with respect to the substrate. The offset, 120 mu C/cm2 at 300 kV/cm driving electric fi eld, was obtained. These results showed that compositionally graded (Pb, Ca )TiO3 thin films had enhanced dielectric properties and abnormal ferroelect ric properties which can be used in various microelectronic devices. (C) 20 00 American Institute of Physics. [S0003-6951(00)04518-6].