We report on the use of near-field optical force sensors for Kelvin probe f
orce microscopy (KPFM) and surface potential measurements. It is shown that
a very good potential sensitivity of less than 5 mV can be obtained using
such tips. In addition, it is found that the contact potential difference m
easured using these tips is independent of the scanning height, as long as
it is below 40 nm, and of the applied AC amplitude as long as it is in the
range of 1-3 V. (C) 2000 Elsevier Science B.V. All rights reserved.