Y. Arakawa et al., Progress in GaN-based nanostructures for blue light emitting quantum dot lasers and vertical cavity surface emitting lasers, IEICE TR EL, E83C(4), 2000, pp. 564-572
Our recent progress in GaN-based nanostructures for quantum dot (QD) lasers
and vertical microcavity surface emitting lasers (VCSELs) is discussed. We
have grown InGaN self-assembled QDs on a GaN epitaxial layer, using atmosp
heric-pressure metalorganic chemical vapor deposition. The average diameter
of the QDs was as small as 8.4 nm and strong photoluminescence emission fr
om the QDs was observed at room temperature. Furthermore, we found that InG
aN QDs could he formed even after 10 QD layers were stacked, thus increasin
g the total QD density. Using these growth results, we fabricated a laser s
tructure with InGaN QDs embedded in the active layer. A clear threshold was
observed in the dependence of the emission intensity on the excitation ene
rgy at room temperature under optical excitation. We succeeded in demonstra
ting in lasing action in vertical cavity surface emitting lasers at room te
mperature with a cavity finesse of over 200.