Morphological change and inhibitory effect on Ag surface by ArF excimer laser irradiation

We have carried out studies of morphologies of silver surfaces irradiated b y ArF eximer laser irradiation in vacuum (10(-3) Pa). Three different morph ologies were observed corresponding to various laser fluences. In the high irradiation region (above 600 mJ/cm(2)), wave-like ridges and droplets were observed. In the intermediate region (about 200 mJ/cm(2)), ripples were ob served. In the low irradiation region (below 70 mJ/cm(2)), changes were not observed using an optical microscope, but were with an atomic force micros cope (AFM). We have clarified that laser irradiation in the fluence range b elow 70 mJ/cm2 yields a silver surface with excellent corrosion-resistant p roperties.