Numerical study of the effects of frequency in inductively coupled plasma using particle-in-cell/Monte Carlo simulation

The effects of induction frequency on inductively coupled plasma (ICP) have been investigated in a collision-dominated region in Ar under a constant d issipated power using the particle-in-cell/Monte Carlo (PIC/MC) simulation. The plasma density, potential, electron energy distribution and mean elect ron energy are discussed as a function of the applied frequencies of 6.78 M Hz, 13.56 MHz, 27.12 MHz and 100 MHz at pressure of 100 mTorr and 300 mTorr .