We demonstrate spatial resolution of ferromagnetic resonance in a microscop
ic sample of YIG using ferromagnetic resonance force microscopy (FMRFM). Me
asurements were performed on a small single crystal YIG film grown on a GGG
substrate, roughly rectangular in shape 20 mu mx similar to 150 mu m and 3
mu m thick. The perpendicular and parallel force geometries of FMRFM, in c
onjunction with an external bias field both parallel and perpendicular to t
he film, were used to scan the sample. This enabled the detection of strong
signals, even at atmospheric pressure and room temperature. The fundamenta
l and higher-order magnetostatic modes were observed to have 26-29 Gauss se
paration. The intensity of these modes exhibited spatial variation as the m
agnetic tip was scanned over the sample, and this behavior is qualitatively
explained by DE theory. An improved fabrication method for magnet on canti
lever was employed, which yielded a spatial resolution of 15 mu m. These re
sults demonstrate the potential of FMRFM for investigating the spatial depe
ndence of ferromagnetic resonance, and for studying the anisotropy fields a
nd exchange coupling effects within multilayer films and small magnetic sys
tems. (C) 2000 American Institute of Physics. [S0021-8979(00)80608-8].