The effect of interface on the electrical properties of (Ba, Sr)TiO3 adopting the perovskite electrodes

Perovskite type conducting materials (Ca, Sr)RuO3 and (Ba, Sr)RuO3 were pre pared by rf magnetron sputtering as bottom electrodes for (Ba, Sr)TiO3 thin film capacitors. The crystallinity, interface property, and electrical pro perties of the (Ba, Sr)TiO3 capacitor applying the perovskite oxide electro des were investigated. The interface between the dielectric and the electro de were analyzed by high-resolution electron microscopy and Auger electron spectroscopy. The interface had a marked effect on the electrical propertie s of the (Ba, Sr)TiO3 thin films. Dielectric constant for the (Ba, Sr)TiO3 had considerable dependence on the thickness of interfacial layer. The leak age current density of the capacitor was sensitive not only to the structur al match but also to the chemical match between (Ba, Sr)TiO3 and the electr ode. (C) 2000 American Institute of Physics. [S0021- 8979(00)01806-5].