Full scale reactor model based on fluid equations is widely used to analyze
high density plasma reactors. It is well known that the submillimeter scal
e sheath in front of a biased electrode supporting the wafer is difficult t
o resolve in numerical simulations, and the common practice is to use resul
ts for electric field from some form of analytical sheath model as boundary
conditions for full scale reactor simulation. There are several sheath mod
els in the literature ranging from Child's law to a recent unified sheath m
odel [P. A. Miller and M. E. Riley, J. Appl. Phys. 82, 3689 (1997)]. In the
present work, the cold ion fluid equations in the radio frequency sheath a
re solved numerically to show that the spatiotemporal variation of ion flux
inside the sheath, commonly ignored in analytical models, is important in
determining the electric field and ion energy at the electrode. Consequentl
y, a semianalytical model that includes the spatiotemporal variation of ion
flux is developed for use as boundary condition in reactor simulations. Th
is semianalytical model is shown to yield results for sheath properties in
close agreement with numerical solutions. (C) 2000 American Institute of Ph
ysics. [S0021-8979(00)02810-3].