Modeling a metal-vapor buffer-gas hollow cathode discharge

Citation
Aj. Lichtenberg et Ma. Lieberman, Modeling a metal-vapor buffer-gas hollow cathode discharge, J APPL PHYS, 87(10), 2000, pp. 7191-7197
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JOURNAL OF APPLIED PHYSICS
ISSN journal
00218979 → ACNP
Volume
87
Issue
10
Year of publication
2000
Pages
7191 - 7197
Database
ISI
SICI code
0021-8979(20000515)87:10<7191:MAMBHC>2.0.ZU;2-G
Abstract
The operation of a metal-vapor buffer-gas hollow cathode discharge is re-ex amined using modeling techniques that have been developed for electronegati ve plasma discharges. It is shown that a previously developed global model can be extended to give spatially resolved densities as well as more accura te values for the plasma parameters. A numerical calculation for a neon-cop per (Ne-Cu) discharge is used to illustrate the results of the modeling tec hnique. The density profiles of the neutral and ion components, and their v ariation with the buffer gas pressure, are similar to those found by numeri cal solution of the complete equations. (C) 2000 American Institute of Phys ics. [S0021-8979(00)06010-2].