The technique of plasma enhanced chemical vapor deposition has been used to
synthesize Fe nanoparticles in an amorphous boron carbide matrix. The nano
particles range in size from approximately 0.7 to 4.5 nm. It has been demon
strated that the size of the nanoparticles is proportional to the density o
f the Fe precursor (ferrocene) in the vapor. The matrix films have been fou
nd to be extremely hygroscopic. Upon absorption of moisture the films buckl
e and delaminate from the Si substrate. The buckling is a consequence of in
duced strain arising from the transformation of the Fe nanoparticles into a
lpha-Fe2O3. The formation of alpha-Fe2O3 has been verified by electron diff
raction and near edge x-ray absorption fine structure measurements. Examina
tion of the magnetic properties of the alpha-Fe2O3 using the technique of m
agnetic circular dichroism indicate that the nanoparticles are not ferromag
netic. (C) 2000 American Institute of Physics. [S0021-8979(00)08609-6].