A method to calculate the contact stiffness between a layered material and
an ultrasonic atomic force microscope (UAFM) tip is proposed. The radiation
impedance method is used to determine the ratio of the applied force to th
e average displacement within the contact area. This information is used in
an iterative algorithm based on Hertzian theory to obtain the contact stif
fness. The algorithm converges into a couple of iterations and does not suf
fer from numerical convergence difficulties as does finite element analysis
(FEA). In the ultrasonic frequency range, comparisons with Hertzian theory
and FEA show the validity of the results in a quasistatic case. Definition
s of the minimum detectable layer thickness and the penetration depth of th
e UAFM are given and evaluated for several thin film-substrate pairs. These
results also show the potential of the method for modeling defects and pow
er loss due to radiation in layered materials. (C) 2000 American Institute
of Physics. [S0021-8979(00)01110-5].