Electrical and optical properties of pyrolytically electrostatic sprayed fluorine-doped tin-oxide: Dependence on substrate-temperature and substrate-nozzle distance

Tin-oxide (SnO2) thin films were prepared by a modified spray technique cal led electrostatic spray pyrolysis. Their electrical and optical properties dependence on fluorine concentration, substrate temperature T-s, and the su bstrate-nozzle distance D-sn was studied. D-sn and T-s seem to be interrela ted for the optimization of good quality fluorine-doped SnO2 films. Films o f about 9x10(-4) Omega cm resistivity and high visible 85% transparency wer e obtained for a substrate temperature of 550 degrees C, a 6 cm substrate n ozzle distance, and 80% of hydrofluorhydric acid HF in the starting solutio n. These data are discussed in light of the kinetics reaction. (C) 2000 Ame rican Institute of Physics. [S0021-8979(00)05610-3].