The spatial distribution and resolution of coaxial backscattered electronsin SEM, calculated by Monte Carlo simulations

We simulate, within a sample, the trajectories of the backscattered electro ns detected in a scanning electron microscopy with a particular detection g eometry. Thus we obtain the depth and lateral distributions, according to t he adjustable parameter values, of the detected electrons. Finally, the sca nline profile across a chemical edge is drawn. The conditions corresponding to the best lateral resolution are established; we obtain an ultimate reso lution of the same order as the beam diameter.