The coherency matrix formalism based on Pauli matrices is applied to analyz
e a general ellipsometer that is described by Jones matrices. Here the Jone
s matrices are represented as sums of appropriate coefficients times the Pa
uli matrices and the identity matrix, and intensities are represented as tr
aces of coherency matrices. This approach allows us not only to treat parti
al polarizations explicitly but also to take advantage of various identitie
s to reduce to algebra the operations necessary for system analysis. A gene
ral expression is obtained for the intensity transmitted through a polarize
r-sample-compensator-analyzer (PSCA) ellipsometer. This general expression
is applied to an ideal PSCA ellipsometer, and then the results are reduced
to describe several simpler but commonly used configurations. The results p
rovide insight regarding general capabilities and limitations and allow us
to compare different ellipsometer systems directly. Finally, this expressio
n is extended to include artifacts, the explicit representation of which al
lows a complete determination of their defects. (C) 2000 Optical Society of
America [S0740-3232(00)01505-2].