Grazing-incidence SAXS/WAXD on nanosized TiO2 films obtained by ALE

Authors
Turkovic, A
Citation
A. Turkovic, Grazing-incidence SAXS/WAXD on nanosized TiO2 films obtained by ALE, MAT SCI E B, 75(1), 2000, pp. 85-91
Citations number
29
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
ISSN journal
09215107 → ACNP
Volume
75
Issue
1
Year of publication
2000
Pages
85 - 91
Database
ISI
SICI code
0921-5107(20000515)75:1<85:GSONTF>2.0.ZU;2-B
Abstract
Titanium dioxide films on glass substrate were obtained by the atomic layer epitaxy (ALE) method. The average grain radius (R), obtained by grazing-in cidence small-angle X-ray scattering (GISAXS), was 13.6 +/- 2.3 nm. The ave rage grain size (R) of 14.1 +/- 2.1 nm obtained by grazing-incidence wide-a ngle X-ray diffraction (GIWAXD) agrees with GISAXS values. The fractal natu re of these samples is analyzed. (C) 2000 Elsevier Science S.A. All rights reserved.