Components for optoelectronic and photonic integrated circuits - design, modelling, manufacturing and monolithic integration on silicon

This paper presents our results in the held of silicon optoelectronic and p hotonic integrated circuits. We integrated photodetectors, linear or logic electronic circuits, waveguides, coupling elements, interferometers, transd ucing layers and micromechanical structures on the same silicon chip. Desig n, modelling and experimental manufacture of these components are presented , underlining the original approaches and results. Special structures for p hotodetectors were designed in order to allow monolithic integration with e lectronic circuits and waveguides. The attention was focused on the matchin g of all the involved technologies, to allow the monolithic integration of all components. (C) 2000 Elsevier Science S.A. All rights reserved.