In this work we develop a submicronic transistor model (narrow and short ch
annel) to study MOSFET's ageing using the charge pumping technique. In this
model, implemented in SPICE3F4, a majority of physical effects have been i
ncorporated for the different functioning regions. They concern the reducti
on mobility effect, the carriers velocity saturation, the channel length mo
dulation, the short channel effect, the threshold voltage variation with th
e reverse bias voltage (V-rev), and the distribution of the interface state
s. The results obtained are compared to other theoretical and experimental
results. (C) 2000 Elsevier Science Ltd. All rights reserved.