Quantitative energy-filtering transmission electron microscopy (EFTEM)

Energy-filtered transmission electron microscopy (EFTEM) can be used to acq uire elemental distribution images at high lateral resolution within short acquisition times. In this paper we discuss the unique advantages of EFTEM in terms of information content, resolution, sensitivity and detection limi ts. Applications in different fields of research, both in materials science and in life sciences, demonstrate the potential of EI;TEM fur characterizi ng nano-sized structures. In the first example, we show how secondary phase s in a steel specimen can be easily detected by recording jump ratio images of the matrix element under rocking beam illumination. Secondly, we descri be how elemental maps carl be converted into concentration maps by calculat ing atomic ratio maps. Thirdly, we show how the energy-loss near edge struc tures (ELNES) carl be used for mapping chemical bonding states thus differe ntiating between various modifications of an element. Finally, we present r ecent results on investigations of deposits in lung tissues and how useful EFTEM call be for defect analysis in semiconductor devices.