Quantitative measurements of frequency shift vs distance curves of ultrahig
h-vacuum force microscopy in a noncontact mode are presented. Different con
tributions from electrostatic, van der Waals, and chemical interactions are
determined by a systematic procedure. First, long-range electrostatic inte
ractions are eliminated by compensating for the contact potential differenc
e between the probing tip and the sample. Second, the long-range van der Wa
als contribution is determined by fitting the data for distances between 1
and 6 nm. Third, the van der Waals part is subtracted from the interaction
curves. The remaining part corresponds to the shea-range chemical interacti
on, and is found to decrease exponentially. A Morse potential is used to fi
t these data. The determined parameters indicate that the interaction poten
tial between single atoms can be measured by force microscopy in a nonconta
ct mode.