A metallic microcantilever electric contact probe array incorporated in anatomic force microscope

We present the realization and performance of a multiprobe microcontactor m ade of an array of metallic microcantilevers inserted in an atomic force mi croscope (AFM). This instrument permits simultaneous AFM imaging and electr ical characterization of nanoscale devices. It is therefore well adapted fo r future generations of molecular devices. The probes are 2-mu m-wide metal lic cantilevers that are brought in contact with 3 mu m x 3 mu m metallic p ads of a nanocircuit using a nanopositioning table. The performance of the instrument, tested on mesoscopic metallic wires and carbon nanotubes, shows that the reproducibility of the electrical contact between the probes and the circuit is better than 99.2%. (C) 2000 American Institute of Physics. [ S0034-6748(00)00305-1].