High voltage vacuum feedthroughs

Technology processes in vacuum demand for their realisation the support of different kinds of energy from outside in the hermetically closed working v essel. Components enabling the vacuum sealed transfer of electrical leads, tubes for fluids, motion links, poles and axes are named vacuum feedthrougs . In this category of elements an important position belong to high voltage feedthroughs. They are made of specially selected materials. The conductin g wire passes a high quality electrical insulator which (at the same time) has to enable very good sealing on its surfaces. The best of nowadays possi bilities is Al2O3 - ceramics with hermetical metal-ceramics joint. Such joi nts were also developed in Institute FEVT. Now - needing good HV feedthroug hs for manufacturing Penning pressure sensors and ion-getter pumps - we dec ided to use our mentioned experiences. The contribution represents the know ledge on metal-ceramics joints and some constructions suitable for our purp oses.