Elastic and plastic energies in sputtered multilayered Ti-TiN films estimated by nanoindentation

Energetic parameters for describing mechanical properties, which makes it p ossible to discuss deformation behavior of a film elastically and plastical ly, are presented. Elastic energy and dissipated energy estimated from the area surrounded by a load-displacement curve obtained by nanoindentation me asurement indicate the energy to deform a film elastically and plastically. The energy dissipated ratio defined as the ratio of dissipated energy to t otal applied energy to a film indicates the tendency for plastic deformatio n of a film. By considering the two energies and the energy dissipated rati o, deformation behavior of compositionally modulated Ti-TiN films with a mu ltilayered structure was examined. At a modulation period of 10 nm, the red uction of the dissipated energy and the energy dissipated ratio were observ ed. Since the dissipated energy is consistent with energy for the propagati on of the dislocations related to plastic deformation, it was assumed that the reduction was caused by a pinning effect for the propagation of the dis locations at interfaces of Ti and TiN. (C) 2000 Elsevier Science S.A. All r ights reserved.