Nucleation and growth of diamond films on molybdenum

The nucleation and growth of diamond films on molybdenum were investigated by scanning electron microscopy and Raman spectroscopy. Diamond films were deposited by hot-filament chemical vapor deposition via electron emission-e nhanced nucleation, in which a de negative voltage relative to the filament was applied to a tungsten electrode that was previously coated with diamon d, by chemical vapor deposition. The electrode-to-substrate distance was on e of the deposition variables. The maximum value of the nucleation density was found to be up to 10(11) cm(-2) on a pristine Mo surface by electron em ission-enhanced nucleation. Electron emission-enhanced nucleation also grea tly improved the quality and adhesion of diamond films on a Mo substrate. ( C) 2000 Elsevier Science S.A. All rights reserved.