X-ray photoelectron spectroscopy (XPS/XAES) and work function measurements
(WF) have been used to study the Cu/ZrO2 interface. Copper was deposited up
to a thickness of 26 Angstrom at room temperature (RT) and up to 8 Angstro
m at 673 K. At RT deposition it was found that, after the formation of just
about 1 ML, copper starts to form three-dimensional clusters, exhibiting a
Stranski-Krastanov growth process. At 673 R. 3D copper clusters begin to f
orm from the very early stages of deposition. which reveals a stronger 3D c
haracter. The XPS results did nor show any strong interaction between ZrO2
and Cu. Copper clusters exhibited core-level shifts due to both final and i
nitial state effects. Work function measurements carried out during deposit
ion at 673 R yielded additional information about the copper growth mode an
d the copper-zirconia interaction, which is consistent with the XPS results
. Furthermore, the work function of clean ZrO2 was measured as 3.1+/-0.1 eV
from the width of the ultraviolet photoelectron spectrum (UPS). (C) 2000 E
lsevier Science B.V. All rights reserved.