We describe a new experimental technique utilizing incident beam diffractio
n in electron stimulated desorption (ESD) to determine the initial atomic b
onding structure of desorbates. Diffraction in ESD can provide detailed inf
ormation about the ground stale surface bonding geometry of the absorber wi
th sub-angstrom resolution of bond vectors. We discuss the role of electron
diffraction in ESD, and demonstrate these ideas with experimental measurem
ents of Cl+ ion ESD from chlorinated Si(111)-(7 x 7) and (1 x 1) surfaces.
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