A SURFACE SOL-GEL PROCESS OF TIO2 AND OTHER METAL-OXIDE FILMS WITH MOLECULAR PRECISION

Authors
ICHINOSE I SENZU H KUNITAKE T
Citation
I. Ichinose et al., A SURFACE SOL-GEL PROCESS OF TIO2 AND OTHER METAL-OXIDE FILMS WITH MOLECULAR PRECISION, Chemistry of materials, 9(6), 1997, pp. 1296
Citations number
21
Categorie Soggetti
Chemistry Physical","Material Science
Journal title
Chemistry of materials → ACNP
ISSN journal
08974756
Volume
9
Issue
6
Year of publication
1997
Database
ISI
SICI code
0897-4756(1997)9:6<1296:ASSPOT>2.0.ZU;2-#
Abstract
Fabrication of metal oxide thin films with thickness control of nanome ter precision is an important technology that leads to wide practical applications. The present study demonstrates that a surface sol-gel pr ocess, composed of chemisorption of alkoxide, rinsing, hydrolysis, and drying, is a superior technique for the preparation of ultrathin meta l oxide films with molecular precision. The simplicity of this process should be a great advantage in commercial production of nanosized oxi de films.