NOVEL METHOD OF THERMAL EPOXY CURING BASED ON PHOTOGENERATION OF POLYMERIC AMINES AND NEGATIVE-TONE IMAGE-FORMATION

Polymeric amines generated by UV-induced electron transfer in polymeri c quaternized tetraalkylammonium berate salts are found suitable for t he thermal cross-linking of epoxides where nucleophilic attack on the epoxy ring is favorable. A cross-linked polymer network insoluble in o rganic solvent becomes the basis of a negative-tone photoimaging syste m. Sensitivity and resolution parameters have been evaluated by atomic force microscopy (AFM). Addition of reagents containing hydroxyl moie ties to a film containing both the polymeric amine precursor and epoxi de improves sensitivity more than 3-fold manifesting chemical amplific ation due to the catalytic nature of the cross-linking process.