Modified sol-gel process for the preparation of BaTiO3 and PbTiO3 ferroelectric films

A modified method for preparing barium and lead titanate films is suggested , which combines precipitation from solution and elements of sol-gel proces sing. The similar to 1-mu m-thick BaTiO3/Pt and PbTiO3/Pt films deposited o n Pt foil are transparent, show good adhesion, and have the 1 : 1 : 3 stoic hiometry. The films are fine-grained, with a mean grain size of 0.1-0.2 mu m. The barium titanate films are characterized by t(C) = 110-125 degrees C, epsilon(20) = 167-500, tan delta(20) = 0.015-0.06, epsilon(max) = 1050, P- s = 3.2 mu C/cm(2), E-c = 14 kV/cm, rho = (5-7) x 10(9) Omega cm, and V-br = 80-150 kV/cm. The lead titanate films are characterized by c/a = 1.056, e psilon(20) = 105-110, tan delta(20) = 0.11-0.16, P-s = 4.1 mu C/cm(2), E-c = 34 kV/cm, rho = (0.8-3.0) x 10(9) Omega cm, and V-br = 50-100 kV/cm.