Microwave plasma chemical vapor deposition was used to deposit ultrasmooth
nanostructured diamond films (roughness of 14 nm) on a titanium alloy (Ti-6
Al-4V) by employing a feedgas mixture containing a high methane fraction (1
5% by volume) in nitrogen and hydrogen. Of particular interest in this stud
y is the exceptional adhesion of the 4-mu m-thick diamond coatings to the m
etal substrates as observed by indentation testing up to 150 kg load with a
1/8-in.-diameter tungsten carbide ball. No film delamination was observed
up to 150 kg indentation load for each of 5 samples grown under the same pr
ocessing conditions. Scanning electron microscopy of the Film surrounding t
he indentations revealed circumferential microcracking beginning at loads r
anging from 60 kg to as high as 150 kg. The strain to cause film microcrack
ing was estimated from calculations of indentation surface areas to be as h
igh as 1.9 +/- 0.2%, which represents a significant improvement in toughnes
s over other ceramic coatings.