Applying the N-P coupling technique, fifteen new poly(arylazophosphonate)s
were synthesized by interfacial polycondensation from bifunctional diazoniu
m salts and bifunctional phosphoric diesters. Because of their excellent fi
lm forming properties and absorption behaviour poly(arylazophosphonate)s ar
e suitable materials for laser ablation experiments with XeCl excimer laser
s (308 nm). A variety of ablated structures have been generated by irradiat
ion of the polymer films with a commercially available pulsed XeCl excimer
laser. Macro experiments indicate remarkable structures with sharp edges, c
lear contours, and flat bottoms. Moreover, various patterns with mu m dimen
sions were generated by micro experiments and were characterized by means o
f scanning electron microscopy (SEM). The resolution of these structures in
dicate that poly(arylazophosphonate)s are suitable materials for applicatio
ns in microtechnology.