1999 Roadmap: Solutions and caveats

Authors
Van den hove, L Foroudhi, R Jeppsson, B Goebel, P McLaughlin, PF Chisolm, S van den Hoek, W Granneman, E Parodi, M Brissenden, JL Jackson, J Dance, DL Berger, R Younger, P
Citation
L. Van Den Hove et al., 1999 Roadmap: Solutions and caveats, SOL ST TECH, 43(5), 2000, pp. 76
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Volume
43
Issue
5
Year of publication
2000
Database
ISI
SICI code
0038-111X(200005)43:5<76:1RSAC>2.0.ZU;2-X
Abstract
While the 1999 ITRS is a Roadmap for sustaining IC progress, the needed und erlying manufacturing capability is based on solutions from equipment and m aterials suppliers, Addressing the list of potholes, detours, and even "red -flagged" roadblocks in the 1999 ITRS, CEOs and other executives from a bro ad range of semiconductor equipment and materials suppliers highlight their companies' new solutions and breakthroughs that may make the road passable , and describe ongoing work to tackle remaining problems.